Inventor
BEIERL HELMUT
DE24 patents
⚠️ This page may combine multiple inventors who share the name “BEIERL HELMUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
9 patentsUS7187503B2Mar 6, 2007
Refractive projection objective for immersion lithography
ZEISS CARL SMT AG68 citations98
US7426082B2Sep 16, 2008
Catadioptric projection objective with geometric beam splitting
ZEISS CARL SMT AG20 citations93
US6995930B2Feb 7, 2006
Catadioptric projection objective with geometric beam splitting
ZEISS CARL SMT AG39 citations93
US7006304B2Feb 28, 2006
Catadioptric reduction lens
ZEISS CARL SMT AG24 citations92
US6806942B2Oct 19, 2004
Projection exposure system
ZEISS CARL SMT AG32 citations92
US7136220B2Nov 14, 2006
Catadioptric reduction lens
ZEISS CARL SMT AG19 citations84
US7782440B2Aug 24, 2010
Projection lens system of a microlithographic projection exposure installation
ZEISS CARL SMT AG8 citations83
US7408716B2Aug 5, 2008
Refractive projection objective for immersion lithography
ZEISS CARL SMT AG2 citations63
US6985286B2Jan 10, 2006
Catadioptric optical system and exposure apparatus having the same
ZEISS CARL SMT AG4 citations63
ZEISS STIFTUNG
5 patentsUS6665126B2Dec 16, 2003
Projection exposure lens with aspheric elements
ZEISS STIFTUNG66 citations96
US6496306B1Dec 17, 2002
Catadioptric optical system and exposure apparatus having the same
ZEISS STIFTUNG64 citations96
US6349005B1Feb 19, 2002
Microlithographic reduction objective, projection exposure equipment and process
ZEISS STIFTUNG74 citations96
US6424471B1Jul 23, 2002
Catadioptric objective with physical beam splitter
ZEISS STIFTUNG40 citations91
US6903802B2Jun 7, 2005
Projection objective having adjacently mounted aspheric lens surfaces
ZEISS STIFTUNG2 citations63
ZEISS CARL SEMICONDUCTOR MFG
3 patentsUS6646718B2Nov 11, 2003
Projection objective having adjacently mounted aspheric lens surfaces
ZEISS CARL SEMICONDUCTOR MFG49 citations96
US6717746B2Apr 6, 2004
Catadioptric reduction lens
ZEISS CARL SEMICONDUCTOR MFG30 citations92
US7154678B2Dec 26, 2006
Projection objective having adjacently mounted aspheric lens surfaces
ZEISS CARL SEMICONDUCTOR MFG0 citations52