Inventor

YAO XIAOQIANG

US3 patents

⚠️ This page may combine multiple inventors who share the name “YAO XIAOQIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US12217972B2Feb 4, 2025

Multi-state pulsing for achieving a balance between bow control and mask selectivity

LAM RES CORP3 citations69

US7001529B2Feb 21, 2006

Pre-endpoint techniques in photoresist etching

LAM RES CORP2 citations58

UNIV IOWA STATE RES FOUND INC

1 patent

US5236691AAug 17, 1993

Ternary metal-rich sulfide with a layered structure

UNIV IOWA STATE RES FOUND INC2 citations49