Inventor
JOO WONDON
KR7 patents
Patents
7 patentsUS12538758B2Jan 27, 2026
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
SAMSUNG ELECTRONICS CO LTD0 citations56
US11823961B2Nov 21, 2023
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
SAMSUNG ELECTRONICS CO LTD1 citations56
US12487532B2Dec 2, 2025
EUV collector inspection apparatus and inspection method
SAMSUNG ELECTRONICS CO LTD0 citations55
US12557587B2Feb 17, 2026
Apparatus and method monitoring semiconductor manufacturing equipment
SAMSUNG ELECTRONICS CO LTD0 citations46
US12387963B2Aug 12, 2025
Optical assembly for alignment inspection, optical apparatus including the same, die bonding system and die bonding method using the same
SAMSUNG ELECTRONICS CO LTD0 citations46
US12366444B2Jul 22, 2025
Optical assembly for parallelism measurement, optical apparatus including the same, die bonding system and die bonding method using the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US11898912B2Feb 13, 2024
Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations45