Inventor

KIM KYONG NAM

KR7 patents

⚠️ This page may combine multiple inventors who share the name “KIM KYONG NAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YEOM GEUN-YOUNG

2 patents

US8974630B2Mar 10, 2015

Inductively coupled plasma processing apparatus having internal linear antenna for large area processing

YEOM GEUN-YOUNG0 citations35

US8293069B2Oct 23, 2012

Inductively coupled plasma apparatus

YEOM GEUN-YOUNG0 citations34

ORIOL INC

1 patent

US6818532B2Nov 16, 2004

Method of etching substrates

ORIOL INC50 citations94

LG ELECTRONICS INC

1 patent

US7012012B2Mar 14, 2006

Method of etching substrates

LG ELECTRONICS INC22 citations91

UNIV SUNGKYUNKWAN FOUND

1 patent

US7842159B2Nov 30, 2010

Inductively coupled plasma processing apparatus for very large area using dual frequency

UNIV SUNGKYUNKWAN FOUND4 citations61

SUNGKYUKWAN UNIVERSITY

1 patent

US7338577B2Mar 4, 2008

Inductively coupled plasma processing apparatus having internal linear antenna for large area processing

SUNGKYUKWAN UNIVERSITY4 citations56

DAEJEON UNIV INDUSTRY UNIV COOPERATION FOUNDATION

1 patent

US12482639B2Nov 25, 2025

Method and system for removing L-FC in plasma etching process

DAEJEON UNIV INDUSTRY UNIV COOPERATION FOUNDATION0 citations44