P

Inventor

YAGI KEITA

JP41 patents
⚠️ This page may combine multiple inventors who share the name “YAGI KEITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

22 patents
US11450544B2Sep 20, 2022

Substrate processing apparatus, substrate processing system, and substrate processing method

EBARA CORP8 citations86
US10665487B2May 26, 2020

Substrate processing apparatus, substrate processing system, and substrate processing method

EBARA CORP8 citations84
US10297475B2May 21, 2019

Flattening method and flattening apparatus

EBARA CORP6 citations84
US11883922B2Jan 30, 2024

Substrate processing apparatus

EBARA CORP2 citations73
US10399203B2Sep 3, 2019

Polishing method and polishing apparatus

EBARA CORP4 citations73
US9999955B2Jun 19, 2018

Polishing apparatus and polished-state monitoring method

EBARA CORP4 citations73
US9550269B2Jan 24, 2017

Polishing device and polishing method

EBARA CORP2 citations73
US9390986B2Jul 12, 2016

Polishing apparatus and polishing method

EBARA CORP6 citations73
US11458589B2Oct 4, 2022

Polishing apparatus and polishing member dressing method

EBARA CORP2 citations72
US10828747B2Nov 10, 2020

Substrate polishing apparatus and method

EBARA CORP5 citations72
US12062563B2Aug 13, 2024

Substrate processing apparatus, substrate processing system, and substrate processing method

EBARA CORP0 citations62
US11945075B2Apr 2, 2024

Polishing apparatus and polishing member dressing method

EBARA CORP0 citations62
US10916455B2Feb 9, 2021

Flattening method and flattening apparatus

EBARA CORP0 citations62
US11833636B2Dec 5, 2023

Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate

EBARA CORP0 citations52
US11195729B2Dec 7, 2021

Substrate polishing apparatus and method

EBARA CORP0 citations52
US12496677B2Dec 16, 2025

Polishing apparatus and polishing method

EBARA CORP0 citations51
US12420378B2Sep 23, 2025

Substrate processing apparatus and method for controlling dressing of polishing member

EBARA CORP0 citations51
US11478893B2Oct 25, 2022

Polishing method and polishing apparatus

EBARA CORP0 citations51
US11260496B2Mar 1, 2022

Polishing method and polishing apparatus

EBARA CORP0 citations51
US11759913B2Sep 19, 2023

Polishing method and polishing apparatus

EBARA CORP0 citations48
US12516924B2Jan 6, 2026

Method of producing a model for estimating film thickness of workpiece, method of estimating film thickness of workpiece using such a model, and computer readable storage medium storing program for causing computer to perform the methods

EBARA CORP0 citations42
US10556314B2Feb 11, 2020

Head height adjustment device and substrate processing apparatus provided with head height adjustment device

EBARA CORP0 citations39

HONDA MOTOR CO LTD

11 patents

BSIZE INC

3 patents

SANO YASUHISA

2 patents

UNIV OSAKA

1 patent

YAMAUCHI KAZUTO

1 patent

WAKABAYASHI TAKESHI

1 patent