Inventor
SWEENEY DONALD W
US13 patents
⚠️ This page may combine multiple inventors who share the name “SWEENEY DONALD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUV LLC
7 patentsUS6031598AFeb 29, 2000
Extreme ultraviolet lithography machine
EUV LLC148 citations97
US6821682B1Nov 23, 2004
Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography
EUV LLC61 citations95
US6235434B1May 22, 2001
Method for mask repair using defect compensation
EUV LLC70 citations95
US6967168B2Nov 22, 2005
Method to repair localized amplitude defects in a EUV lithography mask blank
EUV LLC27 citations92
US6210865B1Apr 3, 2001
Extreme-UV lithography condenser
EUV LLC29 citations92
US7049033B2May 23, 2006
EUV lithography reticles fabricated without the use of a patterned absorber
EUV LLC9 citations73
US7022435B2Apr 4, 2006
Method for the manufacture of phase shifting masks for EUV lithography
EUV LLC4 citations61