Inventor
HAKOMORI SHUNJI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “HAKOMORI SHUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM CO LTD
9 patentsUS6773335B2Aug 10, 2004
Apparatus for polishing periphery of device wafer and polishing method
SPEEDFAM CO LTD29 citations92
US6261160B1Jul 17, 2001
Method and apparatus for specular-polishing of work edges
SPEEDFAM CO LTD24 citations92
US6093087AJul 25, 2000
Wafer processing machine and a processing method thereby
SPEEDFAM CO LTD35 citations92
US6250995B1Jun 26, 2001
Apparatus for polishing outer periphery of workpiece
SPEEDFAM CO LTD15 citations84
US6210260B1Apr 3, 2001
Carrier and CMP apparatus
SPEEDFAM CO LTD19 citations83
US6840841B2Jan 11, 2005
Wafer edge polishing system
SPEEDFAM CO LTD11 citations73
US6478660B2Nov 12, 2002
Apparatus of and method for polishing the outer circumferential portions of a circular plate-shaped work
SPEEDFAM CO LTD9 citations73
US6422930B2Jul 23, 2002
Apparatus for removing deposited film
SPEEDFAM CO LTD13 citations73
US5885140AMar 23, 1999
Single-side abrasion apparatus with dresser
SPEEDFAM CO LTD8 citations73
(unassigned)
6 patentsUS6159081ADec 12, 2000
Method and apparatus for mirror-polishing of workpiece edges
28 citations92
US6113490ASep 5, 2000
Work unloading method and surface polishing apparatus with work unloading mechanism
24 citations92
US6116997ASep 12, 2000
Single side work polishing apparatus
21 citations91
US6196906B1Mar 6, 2001
Surface polishing apparatus and method of taking out workpiece
10 citations73
US6155908ADec 5, 2000
Work-loading method and surface-grinding apparatus with work position deviation-adjusting mechanism
6 citations73
US6139408AOct 31, 2000
Surface grinding machine and carrier used therefor
13 citations73