P

Inventor

NAGAHASHI ISAO

JP10 patents
⚠️ This page may combine multiple inventors who share the name “NAGAHASHI ISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM CORP

4 patents
US5329732AJul 19, 1994

Wafer polishing method and apparatus

SPEEDFAM CORP262 citations97
US5498199AMar 12, 1996

Wafer polishing method and apparatus

SPEEDFAM CORP198 citations96
US5498196AMar 12, 1996

Wafer polishing method and apparatus

SPEEDFAM CORP72 citations94
US5762543AJun 9, 1998

Polishing apparatus with improved product unloading

SPEEDFAM CORP19 citations90

SPEEDFAM CO LTD

2 patents
US5097630AMar 24, 1992

Specular machining apparatus for peripheral edge portion of wafer

SPEEDFAM CO LTD55 citations94
US4805348AFeb 21, 1989

Flat lapping machine

SPEEDFAM CO LTD50 citations88

SPEEDFAM COMPANY LTD

1 patent
US5094037AMar 10, 1992

Edge polisher

SPEEDFAM COMPANY LTD62 citations94

SYSTEM SEIKO CO LTD

1 patent
US6089959AJul 18, 2000

Polishing method and polishing apparatus

SYSTEM SEIKO CO LTD34 citations92

SPEEDFAM COMPANY LIMITED

1 patent
US5645472AJul 8, 1997

Polishing device

SPEEDFAM COMPANY LIMITED28 citations89

SPEEDFAM IPEC CORP

1 patent
USRE37622EApr 2, 2002

Wafer polishing method and apparatus

SPEEDFAM IPEC CORP12 citations72