Inventor
KAMIDE YUKIHIRO
JP12 patents
Patents
12 patentsUS5306379AApr 26, 1994
Dry etching apparatus for rectangular substrate comprising plasma bar generation means
SONY CORP23 citations92
US6917155B1Jul 12, 2005
Cathode panel for a cold cathode field emission display and cold cathode field emission display, and method of producing cathode panel for a cold cathode field emission display
SONY CORP13 citations84
US5591302AJan 7, 1997
Process for etching copper containing metallic film and for forming copper containing metallic wiring
SONY CORP17 citations82
US5741742AApr 21, 1998
Formation of aluminum-alloy pattern
SONY CORP8 citations73
US5569627AOct 29, 1996
Process for etching copper containing metallic film and for forming copper containing metallic wiring
SONY CORP7 citations73
US5505322AApr 9, 1996
Process for etching copper containing metallic film and forming copper containing metallic wiring
SONY CORP10 citations73
US5227341AJul 13, 1993
Method of manufacturing a semiconductor device using an isopropyl alcohol ashing step
SONY CORP11 citations73
US5221430AJun 22, 1993
Dry etching method
SONY CORP10 citations73
US5827436AOct 27, 1998
Method for etching aluminum metal films
SONY CORP9 citations68
US7204739B2Apr 17, 2007
Cathode panel for a cold cathode field emission display and cold cathode field emission display, and method of producing cathode panel for a cold cathode field emission display
SONY CORP3 citations62
US6350698B1Feb 26, 2002
Dry etching apparatus and its manufacturing method
SONY CORP6 citations62
US7135378B2Nov 14, 2006
Process for fabricating a semiconductor device having a plurality of encrusted semiconductor chips
SONY CORP6 citations61