Inventor
SCHLETTERER THOMAS
DE15 patents
⚠️ This page may combine multiple inventors who share the name “SCHLETTERER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
6 patentsUS7265917B2Sep 4, 2007
Replacement apparatus for an optical element
ZEISS CARL SMT AG20 citations92
US7529046B2May 5, 2009
Optical element
ZEISS CARL SMT AG16 citations83
US7768723B2Aug 3, 2010
Replacement apparatus for an optical element
ZEISS CARL SMT AG1 citations62
US7085080B2Aug 1, 2006
Low-deformation support device of an optical element
ZEISS CARL SMT AG4 citations62
US7515363B2Apr 7, 2009
Replacement apparatus for an optical element
ZEISS CARL SMT AG0 citations51
US7545483B2Jun 9, 2009
Optical element unit for exposure processes
ZEISS CARL SMT AG0 citations49
ZEISS CARL SMT GMBH
4 patentsUS8902519B2Dec 2, 2014
Replacement apparatus for an optical element
ZEISS CARL SMT GMBH1 citations62
US7995296B2Aug 9, 2011
Replacement apparatus for an optical element
ZEISS CARL SMT GMBH1 citations62
US9081296B2Jul 14, 2015
Replacement apparatus for an optical element
ZEISS CARL SMT GMBH0 citations51
US7369332B2May 6, 2008
Closing module for an optical arrangement
ZEISS CARL SMT GMBH1 citations51