P

Inventor

SORG FRANZ

DE33 patents
⚠️ This page may combine multiple inventors who share the name “SORG FRANZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

12 patents
US11003088B2May 11, 2021

Method and device for the correction of imaging defects

ZEISS CARL SMT GMBH6 citations83
US10197925B2Feb 5, 2019

Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner

ZEISS CARL SMT GMBH2 citations73
US10509336B2Dec 17, 2019

Optical assembly having a thermally conductive component

ZEISS CARL SMT GMBH2 citations70
US9436095B2Sep 6, 2016

Exposure apparatus and measuring device for a projection lens

ZEISS CARL SMT GMBH1 citations62
US8902519B2Dec 2, 2014

Replacement apparatus for an optical element

ZEISS CARL SMT GMBH1 citations62
US7995296B2Aug 9, 2011

Replacement apparatus for an optical element

ZEISS CARL SMT GMBH1 citations62
US11194119B2Dec 7, 2021

Optical assembly having a thermally conductive component

ZEISS CARL SMT GMBH0 citations60
US9977228B2May 22, 2018

Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner

ZEISS CARL SMT GMBH0 citations52
US8659745B2Feb 25, 2014

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

ZEISS CARL SMT GMBH1 citations52
US10620543B2Apr 14, 2020

Method and device for the correction of imaging defects

ZEISS CARL SMT GMBH0 citations51
US10345710B2Jul 9, 2019

Microlithographic projection exposure apparatus and measuring device for a projection lens

ZEISS CARL SMT GMBH0 citations51
US9081296B2Jul 14, 2015

Replacement apparatus for an optical element

ZEISS CARL SMT GMBH0 citations51

ZEISS CARL SMT AG

9 patents

ZAHNRADFABRIK FRIEDRICHSHAFEN

3 patents

KUGLER JENS

2 patents

SORG FRANZ

2 patents

ASML NETHERLANDS BV

1 patent

ZEISS STIFTUNG

1 patent

EHRMANN ALBRECHT

1 patent

DIECKMANN NILS

1 patent

LIMBACH GUIDO

1 patent