Inventor
SORG FRANZ
DE33 patents
⚠️ This page may combine multiple inventors who share the name “SORG FRANZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
12 patentsUS11003088B2May 11, 2021
Method and device for the correction of imaging defects
ZEISS CARL SMT GMBH6 citations83
US10197925B2Feb 5, 2019
Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner
ZEISS CARL SMT GMBH2 citations73
US10509336B2Dec 17, 2019
Optical assembly having a thermally conductive component
ZEISS CARL SMT GMBH2 citations70
US9436095B2Sep 6, 2016
Exposure apparatus and measuring device for a projection lens
ZEISS CARL SMT GMBH1 citations62
US8902519B2Dec 2, 2014
Replacement apparatus for an optical element
ZEISS CARL SMT GMBH1 citations62
US7995296B2Aug 9, 2011
Replacement apparatus for an optical element
ZEISS CARL SMT GMBH1 citations62
US11194119B2Dec 7, 2021
Optical assembly having a thermally conductive component
ZEISS CARL SMT GMBH0 citations60
US9977228B2May 22, 2018
Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner
ZEISS CARL SMT GMBH0 citations52
US8659745B2Feb 25, 2014
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
ZEISS CARL SMT GMBH1 citations52
US10620543B2Apr 14, 2020
Method and device for the correction of imaging defects
ZEISS CARL SMT GMBH0 citations51
US10345710B2Jul 9, 2019
Microlithographic projection exposure apparatus and measuring device for a projection lens
ZEISS CARL SMT GMBH0 citations51
US9081296B2Jul 14, 2015
Replacement apparatus for an optical element
ZEISS CARL SMT GMBH0 citations51
ZEISS CARL SMT AG
9 patentsUS7265917B2Sep 4, 2007
Replacement apparatus for an optical element
ZEISS CARL SMT AG20 citations92
US6897599B2May 24, 2005
System for damping oscillations
ZEISS CARL SMT AG20 citations92
US6844994B2Jan 18, 2005
Optical element deformation system
ZEISS CARL SMT AG34 citations92
US6700715B2Mar 2, 2004
Oscillation damping system
ZEISS CARL SMT AG16 citations84
US7529046B2May 5, 2009
Optical element
ZEISS CARL SMT AG16 citations83
US7760327B2Jul 20, 2010
Reflecting optical element with eccentric optical passageway
ZEISS CARL SMT AG8 citations82
US7471469B2Dec 30, 2008
Device for the low-deformation replaceable mounting of an optical element
ZEISS CARL SMT AG5 citations73
US7768723B2Aug 3, 2010
Replacement apparatus for an optical element
ZEISS CARL SMT AG1 citations62
US7515363B2Apr 7, 2009
Replacement apparatus for an optical element
ZEISS CARL SMT AG0 citations51
ZAHNRADFABRIK FRIEDRICHSHAFEN
3 patentsUS6449550B1Sep 10, 2002
Method for motor reduction while closing the bridging clutch of an automatic transmission for vehicles
ZAHNRADFABRIK FRIEDRICHSHAFEN17 citations78
US7959536B2Jun 14, 2011
Method for shifting a motor vehicle automatic transmission with a hydrodynamic torque converter when the vehicle comes to a stop
ZAHNRADFABRIK FRIEDRICHSHAFEN2 citations59
US7131931B2Nov 7, 2006
Gearbox control system
ZAHNRADFABRIK FRIEDRICHSHAFEN3 citations57