Inventor
SANCHEZ MARTHA I
US5 patents
Patents
5 patentsUS7079223B2Jul 18, 2006
Fast model-based optical proximity correction
IBM86 citations97
US5310625AMay 10, 1994
Process for forming negative tone images of polyimides using base treatment of crosslinked polyamic ester
IBM24 citations92
US11500285B2Nov 15, 2022
Multifunctional polymers
IBM0 citations62
US10345700B2Jul 9, 2019
Negative-tone resist compositions and multifunctional polymers therein
IBM1 citations62
US5633034AMay 27, 1997
Process for forming a circuit assembly
IBM6 citations61