Inventor
FLOYD KIRBY
US5 patents
Patents
5 patentsUS7037376B2May 2, 2006
Backflush chamber clean
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In situ substrate holder leveling method and apparatus
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High resolution substrate holder leveling device and method
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Adjusting a spacing between a gas distribution member and a substrate support
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US7572340B2Aug 11, 2009
High resolution substrate holder leveling device and method
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