Inventor

BENVENISTE VICTOR M

US66 patents

⚠️ This page may combine multiple inventors who share the name “BENVENISTE VICTOR M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BENVENISTE VICTOR M

AXCELIS TECH INC

High mass resolution magnet for ribbon beam ion implanters

Systems and methods for ion beam focusing

Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systems

Two dimensional stationary beam profile and angular mapping

Probe assembly for detecting an ion in a plasma generated in an ion source

Beam uniformity and angular distribution measurement system

Ion source providing ribbon beam with controllable density profile

Ion beam implantation using conical magnetic scanning

Hybrid magnetic/electrostatic deflector for ion implantation systems

High mass resolution magnet for ribbon beam ion implanters

Method and system for microwave excitation of plasma in an ion beam guide

In-situ monitoring on an ion implanter

Electrostatic trap for particles entrained in an ion beam

System and method for removing contaminant particles relative to an ion beam

Method and system for ion beam containment in an ion beam guide

Waveguide for microwave excitation of plasma in an ion beam guide

Ion beam scanning control methods and systems for ion implantation uniformity

Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam

Electrostatic parallelizing lens for ion beams

Ion source and coaxial inductive coupler for ion implantation system

Gas-cooled clamp for RTP

System and method for removing particles entrained in an ion beam

System and method for performing SIMOX implants using an ion shower

Multichannel ion gun

Electrostatic lens for ion beams

Thin magnetron structures for plasma generation in ion implantation systems

EATON CORP

Method for in-process cleaning of an ion source

Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter

System and method for setecing neutral particles in an ion bean

Method and apparatus for ion beam formation in an ion implanter

Method and apparatus for ion beam neutralization

Method and apparatus for ion beam formation in an ion implanter

Ion beam conical scanning system

Ion beam neutralization means generating diffuse secondary emission electron shower

Elliptical ion beam distribution method and apparatus

Ion implanter target chamber

Method and apparatus for ion formation in an ion implanter

Ion beam profiling method and apparatus

Broad beam flux density control

Uniform cross section ion beam system

Ion source block filament with laybrinth conductive path

Ion beam electron neutralizer

VARIAN SEMICONDUCTOR EQUIPMENT

Techniques for independently controlling deflection, deceleration and focus of an ion beam

Techniques for providing a multimode ion source

Technique for shaping a ribbon-shaped ion beam

AMERICAN SCIENCE & ENG INC

High resolution radiation detector

AXCELISS TECHNOLOGIES INC

Method and system for ion beam containment in an ion beam guide

SINCLAIR FRANK

System and method for manipulating an ion beam

KURUNCZI PETER F

Inductively coupled plasma flood gun using an immersed low inductance FR coil and multicusp magnetic arrangement

EATON SEMI CONDUCTOR IMPLANTAT

Treating workpiece with beams