Inventor
SINCLAIR FRANK
US142 patents
⚠️ This page may combine multiple inventors who share the name “SINCLAIR FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS11812539B2Nov 7, 2023
Resonator, linear accelerator configuration and ion implantation system having rotating exciter
APPLIED MATERIALS INC4 citations74
US11596051B2Feb 28, 2023
Resonator, linear accelerator configuration and ion implantation system having toroidal resonator
APPLIED MATERIALS INC4 citations74
US11587778B2Feb 21, 2023
Electrodynamic mass analysis with RF biased ion source
APPLIED MATERIALS INC2 citations73
US11476087B2Oct 18, 2022
Ion implantation system and linear accelerator having novel accelerator stage configuration
APPLIED MATERIALS INC2 citations73
US11189460B1Nov 30, 2021
System, apparatus and method for variable length electrode in linear accelerator
APPLIED MATERIALS INC5 citations73
US10763072B1Sep 1, 2020
Apparatus, system and techniques for mass analyzed ion beam
APPLIED MATERIALS INC2 citations73
US10665415B1May 26, 2020
Apparatus and method for controlling ion beam properties using electrostatic filter
APPLIED MATERIALS INC3 citations73
US11569063B2Jan 31, 2023
Apparatus, system and method for energy spread ion beam
APPLIED MATERIALS INC2 citations72
US11388810B2Jul 12, 2022
System, apparatus and method for multi-frequency resonator operation in linear accelerator
APPLIED MATERIALS INC4 citations72
USD956005SJun 28, 2022
Shaped electrode
APPLIED MATERIALS INC3 citations72
US11127557B1Sep 21, 2021
Ion source with single-slot tubular cathode
APPLIED MATERIALS INC5 citations72
US11094504B2Aug 17, 2021
Resonator coil having an asymmetrical profile
APPLIED MATERIALS INC2 citations72
US11232925B2Jan 25, 2022
System and method for improved beam current from an ion source
APPLIED MATERIALS INC4 citations71
US11120966B2Sep 14, 2021
System and method for improved beam current from an ion source
APPLIED MATERIALS INC4 citations71
VARIAN SEMICONDUCTOR EQUIPMENT
8 patentsUS7888653B2Feb 15, 2011
Techniques for independently controlling deflection, deceleration and focus of an ion beam
VARIAN SEMICONDUCTOR EQUIPMENT33 citations92
US8357912B2Jan 22, 2013
Techniques for providing a multimode ion source
VARIAN SEMICONDUCTOR EQUIPMENT6 citations84
US7855087B2Dec 21, 2010
Floating sheet production apparatus and method
VARIAN SEMICONDUCTOR EQUIPMENT13 citations84
US7700925B2Apr 20, 2010
Techniques for providing a multimode ion source
VARIAN SEMICONDUCTOR EQUIPMENT11 citations84
US7692139B2Apr 6, 2010
Techniques for commensurate cusp-field for effective ion beam neutralization
VARIAN SEMICONDUCTOR EQUIPMENT8 citations84
US7816153B2Oct 19, 2010
Method and apparatus for producing a dislocation-free crystalline sheet
VARIAN SEMICONDUCTOR EQUIPMENT8 citations83
US8853653B1Oct 7, 2014
Apparatus and techniques for controlling ion implantation uniformity
VARIAN SEMICONDUCTOR EQUIPMENT6 citations80
US8884244B1Nov 11, 2014
Dual mode ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT4 citations73
EATON CORP
8 patentsUS5814819ASep 29, 1998
System and method for neutralizing an ion beam using water vapor
EATON CORP32 citations92
US5608223AMar 4, 1997
Ion implantation device
EATON CORP50 citations91
US5670217ASep 23, 1997
Method for capturing and removing contaminant particles from an interior region of an ion implanter
EATON CORP24 citations90
US5656092AAug 12, 1997
Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter
EATON CORP27 citations90
US5760409AJun 2, 1998
Dose control for use in an ion implanter
EATON CORP45 citations89
US6429139B1Aug 6, 2002
Serial wafer handling mechanism
EATON CORP23 citations87
US6347919B1Feb 19, 2002
Wafer processing chamber having separable upper and lower halves
EATON CORP35 citations87
US5525807AJun 11, 1996
Ion implantation device
EATON CORP26 citations87
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
8 patentsUS10651011B2May 12, 2020
Apparatus and techniques for generating bunched ion beam
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC8 citations84
US10192727B2Jan 29, 2019
Electrodynamic mass analysis
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC8 citations84
US9978554B1May 22, 2018
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9 citations82
US10763071B2Sep 1, 2020
Compact high energy ion implantation system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations73
US10504682B2Dec 10, 2019
Conductive beam optic containing internal heating element
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations73
US9978556B2May 22, 2018
Parallelizing electrostatic acceleration/deceleration optical element
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations73
US9805931B2Oct 31, 2017
Liquid immersion doping
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations73
US10468224B2Nov 5, 2019
Apparatus and method for controlling ion beam properties using energy filter
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
(unassigned)
2 patentsSINCLAIR FRANK
2 patentsKELLERMAN PETER L
2 patentsAXCELIS TECH INC
1 patentMORRISON DEAN N
1 patentKOO BON-WOONG
1 patentBILOIU COSTEL
1 patentRADOVANOV SVETLANA
1 patentBENVENISTE VICTOR
1 patentShowing the top 50 of 142 patents by PatentIndex Score.