Inventor

OSSMANN JENS

DE11 patents

⚠️ This page may combine multiple inventors who share the name “OSSMANN JENS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OSSMANN JENS

3 patents

US8253925B2Aug 28, 2012

Catoptric illumination system for microlithography tool

OSSMANN JENS5 citations59

US8174677B2May 8, 2012

Illumination optical system for microlithography

OSSMANN JENS4 citations59

US9588434B2Mar 7, 2017

Catoptric illumination system for microlithography tool

OSSMANN JENS0 citations49

ZEISS CARL SMT AG

2 patents

US7626770B2Dec 1, 2009

Illumination system with zoom objective

ZEISS CARL SMT AG9 citations83

US7586113B2Sep 8, 2009

EUV illumination system

ZEISS CARL SMT AG2 citations61

ENDRES MARTIN

2 patents

US8937708B2Jan 20, 2015

Illumination optics for microlithography

ENDRES MARTIN2 citations60

US8227770B2Jul 24, 2012

EUV illumination system

ENDRES MARTIN0 citations49

ZEISS CARL SMT GMBH

2 patents

US9110378B2Aug 18, 2015

Illumination optical system for projection lithography

ZEISS CARL SMT GMBH1 citations51

US9671608B2Jun 6, 2017

Illumination system for EUV lithography

ZEISS CARL SMT GMBH0 citations40

FIOLKA DAMIAN

1 patent

US8587767B2Nov 19, 2013

Illumination optics for EUV microlithography and related system and apparatus

FIOLKA DAMIAN12 citations82

STUETZLE RALF

1 patent

US9310692B2Apr 12, 2016

Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus

STUETZLE RALF3 citations69