Inventor

TAKUSHIMA KATSUHIRO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “TAKUSHIMA KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MORI JUNJI

2 patents

US8535856B2Sep 17, 2013

Lithographic mask and manufacturing method thereof

MORI JUNJI2 citations58

US8263294B2Sep 11, 2012

Lithographic mask and manufacturing method thereof

MORI JUNJI2 citations58

OKI ELECTRIC IND CO LTD

2 patents

US6800214B2Oct 5, 2004

Method for correcting characteristics of attenuated phase-shift mask

OKI ELECTRIC IND CO LTD1 citations48

US6508949B1Jan 21, 2003

Method for correcting characteristics of attenuated phase-shift mask

OKI ELECTRIC IND CO LTD1 citations48

HOYA CORP

1 patent

US7585418B2Sep 8, 2009

Lithographic mask and manufacturing method thereof

HOYA CORP4 citations60

TAKUSHIMA KATSUHIRO

1 patent

US8067132B2Nov 29, 2011

Photomask and exposure method

TAKUSHIMA KATSUHIRO2 citations54