Inventor

ABBURI MURALI

US8 patents

⚠️ This page may combine multiple inventors who share the name “ABBURI MURALI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

7 patents

US6139701AOct 31, 2000

Copper target for sputter deposition

APPLIED MATERIALS INC85 citations95

US6086725AJul 11, 2000

Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life

APPLIED MATERIALS INC48 citations95

US6391163B1May 21, 2002

Method of enhancing hardness of sputter deposited copper films

APPLIED MATERIALS INC37 citations92

US6660135B2Dec 9, 2003

Staged aluminum deposition process for filling vias

APPLIED MATERIALS INC21 citations91

US6352620B2Mar 5, 2002

Staged aluminum deposition process for filling vias

APPLIED MATERIALS INC27 citations91

US6521107B2Feb 18, 2003

Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life

APPLIED MATERIALS INC8 citations73

US6472867B1Oct 29, 2002

Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life

APPLIED MATERIALS INC3 citations62

APPLIED MATERIAL INC

1 patent

US6436207B1Aug 20, 2002

Manufacture of target for use in magnetron sputtering of nickel and like magnetic metals for forming metallization films having consistent uniformity through life

APPLIED MATERIAL INC4 citations62