Inventor
SINGHVI SHRI
US4 patents
Patents
4 patentsUS6207558B1Mar 27, 2001
Barrier applications for aluminum planarization
APPLIED MATERIALS INC77 citations95
US6368880B2Apr 9, 2002
Barrier applications for aluminum planarization
APPLIED MATERIALS INC33 citations92
US6660135B2Dec 9, 2003
Staged aluminum deposition process for filling vias
APPLIED MATERIALS INC21 citations91
US6352620B2Mar 5, 2002
Staged aluminum deposition process for filling vias
APPLIED MATERIALS INC27 citations91