Inventor
SHIRATO KAORI
JP5 patents
Patents
5 patentsUS7005248B2Feb 28, 2006
Method of forming cavity between multilayered wirings
JSR CORP2 citations60
US6852370B2Feb 8, 2005
Composition for film formation and material for insulating film formation
JSR CORP2 citations60
US7608928B2Oct 27, 2009
Laminated body and semiconductor device
JSR CORP3 citations59
US7049220B2May 23, 2006
Method of forming cavity between multilayered wirings
JSR CORP2 citations57
US6884862B2Apr 26, 2005
Polymer, process for production, composition for film formation containing the same, method of film formation, and insulating film
JSR CORP2 citations57