Inventor
VAN DER SCHOOT HARMEN KLAAS
NL41 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER SCHOOT HARMEN KLAAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
35 patentsUS7483120B2Jan 27, 2009
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
ASML NETHERLANDS BV121 citations98
USRE40043EFeb 5, 2008
Positioning device having two object holders
ASML NETHERLANDS BV96 citations95
US9482960B2Nov 1, 2016
Pellicle for reticle and multilayer mirror
ASML NETHERLANDS BV14 citations92
US6717296B2Apr 6, 2004
Lithographic apparatus and motor for use in the apparatus
ASML NETHERLANDS BV23 citations92
US7359032B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV17 citations90
US7250237B2Jul 31, 2007
Optimized correction of wafer thermal deformations in a lithographic process
ASML NETHERLANDS BV19 citations90
US7310132B2Dec 18, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV25 citations89
US9989844B2Jun 5, 2018
Pellicle for reticle and multilayer mirror
ASML NETHERLANDS BV5 citations84
US7440081B2Oct 21, 2008
Lithographic apparatus, device manufacturing method, and substrate table
ASML NETHERLANDS BV11 citations84
US7292317B2Nov 6, 2007
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating
ASML NETHERLANDS BV13 citations84
US7245047B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations84
US7256866B2Aug 14, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations83
US7760324B2Jul 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations82
US6879377B2Apr 12, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV16 citations79
US10481510B2Nov 19, 2019
Graphene spectral purity filter
ASML NETHERLANDS BV3 citations73
US7064808B1Jun 20, 2006
Substrate carrier and method for making a substrate carrier
ASML NETHERLANDS BV10 citations73
US6943464B2Sep 13, 2005
Lithographic apparatus and motor for use in the apparatus
ASML NETHERLANDS BV10 citations73
US7595496B2Sep 29, 2009
Optimized correction of wafer thermal deformations in a lithographic process
ASML NETHERLANDS BV7 citations72
US7538857B2May 26, 2009
Lithographic apparatus and device manufacturing method utilizing a substrate handler
ASML NETHERLANDS BV7 citations72
US10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US7012264B2Mar 14, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations67
US7408617B2Aug 5, 2008
Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method
ASML NETHERLANDS BV2 citations63
US7492440B2Feb 17, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7088428B2Aug 8, 2006
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7656506B2Feb 2, 2010
Lithographic apparatus and device manufacturing method utilizing a substrate handler
ASML NETHERLANDS BV2 citations61
US7667822B2Feb 23, 2010
Lithographic apparatus and stage apparatus
ASML NETHERLANDS BV6 citations60
US7576835B2Aug 18, 2009
Substrate handler, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US6815699B2Nov 9, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US7352438B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51
US7256867B2Aug 14, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US7230254B2Jun 12, 2007
Movable carriage for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7679720B2Mar 16, 2010
Apparatus configured to position a workpiece
ASML NETHERLANDS BV0 citations48
US10007197B2Jun 26, 2018
Sensor system, substrate handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations42
US6970230B2Nov 29, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37