Inventor
STARREVELD JEROEN PIETER
NL14 patents
⚠️ This page may combine multiple inventors who share the name “STARREVELD JEROEN PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS7250237B2Jul 31, 2007
Optimized correction of wafer thermal deformations in a lithographic process
ASML NETHERLANDS BV19 citations90
US7595496B2Sep 29, 2009
Optimized correction of wafer thermal deformations in a lithographic process
ASML NETHERLANDS BV7 citations72
US9977349B2May 22, 2018
Support device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations65
US11422477B2Aug 23, 2022
Vibration isolation system and lithographic apparatus
ASML NETHERLANDS BV0 citations57
US11550227B2Jan 10, 2023
Projection system and lithographic apparatus comprising said projection system
ASML NETHERLANDS BV0 citations54
US11828344B2Nov 28, 2023
Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations49
US11269262B2Mar 8, 2022
Frame assembly, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US11169450B2Nov 9, 2021
Pneumatic support device and lithographic apparatus with pneumatic support device
ASML NETHERLANDS BV0 citations48
US10816910B2Oct 27, 2020
Vibration isolator, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations47
US10838312B2Nov 17, 2020
Lithographic apparatus, lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations39
US10503086B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37