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Inventor
TANAKA REI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA REI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO ELECTRIC INDUSTRIES
1 patent
US10819083B2
Oct 27, 2020
Vertical cavity surface-emitting laser
SUMITOMO ELECTRIC INDUSTRIES
0 citations
35
ASM JAPAN
1 patent
US7638443B2
Dec 29, 2009
Method of forming ultra-thin SiN film by plasma CVD
ASM JAPAN
0 citations
35