Inventor

HITOMI TAKU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HITOMI TAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM JAPAN

1 patent

US7638443B2Dec 29, 2009

Method of forming ultra-thin SiN film by plasma CVD

ASM JAPAN0 citations35

ASM IP HOLDING BV

1 patent

US10010987B2Jul 3, 2018

Method of mounting substrate support in chamber, method of dismounting substrate support and auxiliary transport tool

ASM IP HOLDING BV0 citations22