Inventor
METZGER LARS
DE9 patents
Patents
9 patentsUS6686638B2Feb 3, 2004
Micromechanical component including function components suspended movably above a substrate
BOSCH GMBH ROBERT81 citations97
US7148077B2Dec 12, 2006
Micromechanical structural element having a diaphragm and method for producing such a structural element
BOSCH GMBH ROBERT27 citations91
US7495302B2Feb 24, 2009
Micromechanical component having a diaphragm
BOSCH GMBH ROBERT8 citations83
US7261825B2Aug 28, 2007
Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device
BOSCH GMBH ROBERT8 citations73
US6905615B2Jun 14, 2005
Method of manufacturing a micromechanical component
BOSCH GMBH ROBERT8 citations73
US7060197B2Jun 13, 2006
Micromechanical mass flow sensor and method for the production thereof
BOSCH GMBH ROBERT10 citations71
US7803646B2Sep 28, 2010
Method for producing a component having a semiconductor substrate and component
BOSCH GMBH ROBERT2 citations62
US7321156B2Jan 22, 2008
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device
BOSCH GMBH ROBERT5 citations62
US6867061B2Mar 15, 2005
Method for producing surface micromechanical structures, and sensor
BOSCH GMBH ROBERT0 citations51