Inventor
LITTAU KARL ANTHONY
US8 patents
⚠️ This page may combine multiple inventors who share the name “LITTAU KARL ANTHONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6024799AFeb 15, 2000
Chemical vapor deposition manifold
APPLIED MATERIALS INC673 citations98
US6125859AOct 3, 2000
Method for improved cleaning of substrate processing systems
APPLIED MATERIALS INC131 citations96
US6103014AAug 15, 2000
Chemical vapor deposition chamber
APPLIED MATERIALS INC62 citations95
US5935338AAug 10, 1999
Chemical vapor deposition chamber
APPLIED MATERIALS INC63 citations95