Inventor

ORITO KOHICHI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “ORITO KOHICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KATO HITOSHI

2 patents

US8721790B2May 13, 2014

Film deposition apparatus

KATO HITOSHI23 citations92

US9416448B2Aug 16, 2016

Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method

KATO HITOSHI1 citations51

ORITO KOHICHI

1 patent

US8746170B2Jun 10, 2014

Substrate process apparatus, substrate process method, and computer readable storage medium

ORITO KOHICHI14 citations79

KATOH HITOSHI

1 patent

US8298341B2Oct 30, 2012

Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus

KATOH HITOSHI2 citations54

TOKYO ELECTRON LTD

1 patent

US9580802B2Feb 28, 2017

Film formation method and apparatus for semiconductor process

TOKYO ELECTRON LTD0 citations39