Inventor
YABUTA HIRONOBU
JP9 patents
Patents
9 patentsUS7459708B2Dec 2, 2008
Extreme UV radiation source device and method for eliminating debris which forms within the device
USHIO ELECTRIC INC10 citations83
US7705334B2Apr 27, 2010
Extreme ultraviolet radiation source device
USHIO ELECTRIC INC10 citations82
US7479645B2Jan 20, 2009
Device for producing extreme UV radiation
USHIO ELECTRIC INC8 citations82
US11774856B2Oct 3, 2023
Extreme ultraviolet light source device
USHIO ELECTRIC INC2 citations62
US11822258B2Nov 21, 2023
Foil trap and light source apparatus including the same
USHIO ELECTRIC INC0 citations59
US9572240B2Feb 14, 2017
Light source apparatus
USHIO ELECTRIC INC0 citations48
US9599812B2Mar 21, 2017
Foil trap and light source device using such foil trap
USHIO ELECTRIC INC1 citations47
US12399437B2Aug 26, 2025
Debris mitigation device and light source apparatus including the same
USHIO ELECTRIC INC0 citations45
US12321107B2Jun 3, 2025
Extreme ultraviolet light source device and protection method for receiving plate member
USHIO ELECTRIC INC0 citations40