Inventor
KAWAI AKITOSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KAWAI AKITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
7 patentsUS6405610B1Jun 18, 2002
Wafer inspection apparatus
NIKON CORP15 citations79
US10760902B2Sep 1, 2020
Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program
NIKON CORP2 citations70
US10557706B2Feb 11, 2020
Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program
NIKON CORP3 citations70
US11016038B2May 25, 2021
Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure
NIKON CORP1 citations59
US11016039B2May 25, 2021
Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure
NIKON CORP0 citations59
US10809209B2Oct 20, 2020
Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method
NIKON CORP0 citations48
US10481106B2Nov 19, 2019
Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method
NIKON CORP0 citations48