Inventor
BHATNAGAR YASHRAJ K
US3 patents
Patents
3 patentsUS6029602AFeb 29, 2000
Apparatus and method for efficient and compact remote microwave plasma generation
APPLIED MATERIALS INC431 citations93
US7775856B2Aug 17, 2010
Method for removal of surface films from reclaim substrates
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US7727782B2Jun 1, 2010
Apparatus for improving incoming and outgoing wafer inspection productivity in a wafer reclaim factory
APPLIED MATERIALS INC0 citations48