P

Inventor

VEPA KRISHNA

US11 patents
⚠️ This page may combine multiple inventors who share the name “VEPA KRISHNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

7 patents
US7402520B2Jul 22, 2008

Edge removal of silicon-on-insulator transfer wafer

APPLIED MATERIALS INC23 citations89
US7208325B2Apr 24, 2007

Refreshing wafers having low-k dielectric materials

APPLIED MATERIALS INC13 citations82
US7775856B2Aug 17, 2010

Method for removal of surface films from reclaim substrates

APPLIED MATERIALS INC9 citations76
US7657390B2Feb 2, 2010

Reclaiming substrates having defects and contaminants

APPLIED MATERIALS INC2 citations61
US7951718B2May 31, 2011

Edge removal of silicon-on-insulator transfer wafer

APPLIED MATERIALS INC4 citations59
US7659206B2Feb 9, 2010

Removal of silicon oxycarbide from substrates

APPLIED MATERIALS INC2 citations57
US7727782B2Jun 1, 2010

Apparatus for improving incoming and outgoing wafer inspection productivity in a wafer reclaim factory

APPLIED MATERIALS INC0 citations48

WAFER SOLUTIONS INC

2 patents
US6672943B2Jan 6, 2004

Eccentric abrasive wheel for wafer processing

WAFER SOLUTIONS INC67 citations90
US6852012B2Feb 8, 2005

Cluster tool systems and methods for in fab wafer processing

WAFER SOLUTIONS INC28 citations85

APPLIED MATREIALS INC

1 patent
US7695982B2Apr 13, 2010

Refurbishing a wafer having a low-k dielectric layer

APPLIED MATREIALS INC0 citations44

VEPA KRISHNA

1 patent
US8874416B2Oct 28, 2014

Process tool chemical and gas usage optimization

VEPA KRISHNA0 citations42