Inventor
CHA SE-HO
KR11 patents
⚠️ This page may combine multiple inventors who share the name “CHA SE-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS9368647B2Jun 14, 2016
Compositions for etching
SAMSUNG ELECTRONICS CO LTD15 citations82
US10910237B2Feb 2, 2021
Operating method for wet etching system and related system
SAMSUNG ELECTRONICS CO LTD1 citations61
US9136120B2Sep 15, 2015
Compositions for etching and methods of forming a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD3 citations61
US9972638B2May 15, 2018
Methods of fabricating three-dimensional semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations51
US7527921B2May 5, 2009
Method of treating and removing a photoresist pattern and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations50