Inventor
BECKERS MARCEL
NL38 patents
⚠️ This page may combine multiple inventors who share the name “BECKERS MARCEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
24 patentsUS7057702B2Jun 6, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV89 citations96
US7804577B2Sep 28, 2010
Lithographic apparatus
ASML NETHERLANDS BV26 citations92
US7411654B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations92
US9857695B2Jan 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10495984B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10209629B2Feb 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US7411658B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7808614B2Oct 5, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations72
US9983489B2May 29, 2018
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation
ASML NETHERLANDS BV5 citations71
US7542127B2Jun 2, 2009
Lithographic apparatus and method for manufacturing a device
ASML NETHERLANDS BV7 citations71
US7522261B2Apr 21, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7136142B2Nov 14, 2006
Lithographic apparatus having a gas flushing device
ASML NETHERLANDS BV2 citations57
US7271873B2Sep 18, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations56
US7072021B2Jul 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations55
US10802410B2Oct 13, 2020
Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid
ASML NETHERLANDS BV0 citations52
US9429853B2Aug 30, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US8004654B2Aug 23, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10088755B2Oct 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9715179B2Jul 25, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10649341B2May 12, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10018925B2Jul 10, 2018
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9606429B2Mar 28, 2017
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9465302B2Oct 11, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US7148951B2Dec 12, 2006
Lithographic apparatus
ASML NETHERLANDS BV0 citations45
BECKERS MARCEL
5 patentsUS8976334B2Mar 10, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL1 citations61
US8462314B2Jun 11, 2013
Lithographic apparatus and device manufacturing method
BECKERS MARCEL3 citations58
US8958054B2Feb 17, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations51
US8259287B2Sep 4, 2012
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations51
US8988651B2Mar 24, 2015
Lithographic apparatus and device manufacturing method
BECKERS MARCEL0 citations50