Inventor
POLIZZI MARCO
NL9 patents
⚠️ This page may combine multiple inventors who share the name “POLIZZI MARCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US10705439B2Jul 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US9904185B2Feb 27, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9507278B2Nov 29, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10018925B2Jul 10, 2018
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9606429B2Mar 28, 2017
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
KEMPER NICOLAAS RUDOLF
3 patentsUS8446563B2May 21, 2013
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF6 citations83
US8953142B2Feb 10, 2015
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF6 citations82
US9097992B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations59