Inventor

BAETEN ADRIANES JOHANNES

NL6 patents

⚠️ This page may combine multiple inventors who share the name “BAETEN ADRIANES JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US11143968B2Oct 12, 2021

Fluid handling structure, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61

US10018925B2Jul 10, 2018

Lithographic apparatus, drying device, metrology apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50

US9606429B2Mar 28, 2017

Lithographic apparatus, drying device, metrology apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50

KEMPER NICOLAAS RUDOLF

1 patent

US8953142B2Feb 10, 2015

Lithographic apparatus, drying device, metrology apparatus and device manufacturing method

KEMPER NICOLAAS RUDOLF6 citations82

DIRECKS DANIEL JOZEF MARIA

1 patent

US9383654B2Jul 5, 2016

Fluid handling structure, lithographic apparatus and device manufacturing method

DIRECKS DANIEL JOZEF MARIA0 citations49

BESSEMS DAVID

1 patent

US9563132B2Feb 7, 2017

Fluid handling structure, a lithographic apparatus and a device manufacturing method

BESSEMS DAVID0 citations38