Inventor
KAIHO TAKAAKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KAIHO TAKAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
6 patentsUS9244347B2Jan 26, 2016
Resist composition, compound, polymeric compound and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD19 citations92
US8685620B2Apr 1, 2014
Resist composition, method of forming resist pattern and polymeric compound
TOKYO OHKA KOGYO CO LTD8 citations83
US9040224B2May 26, 2015
Resist composition, method of forming resist pattern and compound
TOKYO OHKA KOGYO CO LTD3 citations62
US9133102B2Sep 15, 2015
Resist composition, method of forming resist pattern and polymeric compound
TOKYO OHKA KOGYO CO LTD0 citations51
US10838301B2Nov 17, 2020
Resist composition, method of forming resist pattern, fluorine-containing compound, and compound
TOKYO OHKA KOGYO CO LTD0 citations40
US11977330B2May 7, 2024
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations37