Inventor
HATO TOSHIAKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HATO TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
7 patentsUS9244347B2Jan 26, 2016
Resist composition, compound, polymeric compound and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD19 citations92
US9164380B2Oct 20, 2015
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD5 citations72
US9063416B2Jun 23, 2015
Resist composition, method of forming resist pattern and compound
TOKYO OHKA KOGYO CO LTD3 citations62
US8785106B2Jul 22, 2014
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations61
US8354218B2Jan 15, 2013
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations61
US9188863B2Nov 17, 2015
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US9459535B2Oct 4, 2016
Method of forming pattern
TOKYO OHKA KOGYO CO LTD0 citations40