Inventor
ATKINSON GARY M
US12 patents
⚠️ This page may combine multiple inventors who share the name “ATKINSON GARY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HUGHES AIRCRAFT CO
7 patentsUS5596194AJan 21, 1997
Single-wafer tunneling sensor and low-cost IC manufacturing method
HUGHES AIRCRAFT CO44 citations96
US5155053AOct 13, 1992
Method of forming t-gate structure on microelectronic device substrate
HUGHES AIRCRAFT CO77 citations95
US5756895AMay 26, 1998
Tunneling-based rate gyros with simple drive and sense axis coupling
HUGHES AIRCRAFT CO45 citations94
US5665253ASep 9, 1997
Method of manufacturing single-wafer tunneling sensor
HUGHES AIRCRAFT CO28 citations92
US5335243AAug 2, 1994
3-D opto-electronic system with laser inter-substrate communication, and fabrication method
HUGHES AIRCRAFT CO15 citations79
US5501822AMar 26, 1996
Fabrication method for a 3-d opto-electronic system with laser inter-substrate communication
HUGHES AIRCRAFT CO6 citations71
US5047827ASep 10, 1991
Integrated circuit resistor fabrication using focused ion beam
HUGHES AIRCRAFT CO14 citations71