Inventor

NISHIYAMA HIDETOSHI

JP114 patents

⚠️ This page may combine multiple inventors who share the name “NISHIYAMA HIDETOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NISHIYAMA HIDETOSHI

HITACHI HIGH TECH CORP

Method for inspecting defect and apparatus for inspecting defect

Apparatus and method for inspecting defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Method and apparatus for inspecting a defect of a pattern

Method of inspecting defects

Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen

Inspection method and inspection apparatus

Inspection method and inspection system using charged particle beam

Pattern defect inspection method and its apparatus

Method of inspecting a semiconductor device and an apparatus thereof

Inspection method and inspection system using charged particle beam

Inspection method and inspection apparatus using charged particle beam

System for monitoring foreign particles, process processing apparatus and method of electronic commerce

Inspection method and apparatus using charged particle beam

Defect inspection device and defect inspection method

Method and apparatus for reviewing defect

Defects inspecting apparatus and defects inspecting method

Apparatus and method for inspecting defects

Method and apparatus for pattern inspection

Method and apparatus for reviewing defects

Inspection method and inspection system using charged particle beam

Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal

HITACHI LTD

Optical apparatus for defect and particle size inspection

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

Method and its apparatus for inspecting particles or defects of a semiconductor device

Method of inspecting pattern and inspecting instrument

Method of detecting defects on an object

Method of inspecting a semiconductor device and an apparatus thereof

Defect detector and defect detecting method

Semiconductor device inspection method

Method and its apparatus for inspecting particles or defects of a semiconductor device

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for inspecting defects

Apparatus and method for inspecting defects

Apparatus for detecting foreign particle and defect and the same method

Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system

Apparatus and method of inspecting foreign particle or defect on a sample

JEOL LTD

Sample inspection apparatus, sample inspection method and sample inspection system

Sample inspection method, sample inspection apparatus, and sample holder

HITACHI HIGH TECH ELECT ENG CO

Method of inspecting a semiconductor device and an apparatus thereof

RENESAS TECH CORP

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

(unassigned)

Method of inspecting pattern and inspecting instrument

FUKADA ATSUKO

Inspection method and inspection system using charged particle beam

MAEDA SHUNJI

Defect inspection method and device thereof

SAKAI KAORU

Method and apparatus for inspecting patterns formed on a substrate

NAKANO HIROYUKI

Apparatus and method for inspecting defects

HITACHI INT ELECTRIC INC

Redundant failover system, redundancy managing apparatus and application processing apparatus