Inventor
MOTOSUGI TOMOO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MOTOSUGI TOMOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
6 patentsUS9147552B2Sep 29, 2015
Charged particle beam writing method and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC7 citations79
US9190245B2Nov 17, 2015
Charged particle beam writing apparatus, and charged particle beam writing method
NUFLARE TECHNOLOGY INC6 citations70
US11244807B2Feb 8, 2022
Settling time determination method and multi charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations59
US10217606B2Feb 26, 2019
Charged particle beam drawing method and charged particle beam drawing apparatus
NUFLARE TECHNOLOGY INC1 citations58
US9852883B2Dec 26, 2017
Charged particle beam drawing apparatus and charged particle beam drawing method
NUFLARE TECHNOLOGY INC0 citations38
US9583310B2Feb 28, 2017
Charged particle beam writing apparatus, charged particle beam writing method, and shot correction method of charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations38