Inventor
WON JAIHYUNG
KR4 patents
Patents
4 patentsUS7169704B2Jan 30, 2007
Method of cleaning a surface of a water in connection with forming a barrier layer of a semiconductor device
SAMSUNG ELECTRONICS CO LTD12 citations76
US9941135B2Apr 10, 2018
Methods of forming a hard mask layer and of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations64
US7452810B2Nov 18, 2008
Method of forming a barrier layer of a semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations54
US9812331B2Nov 7, 2017
Apparatus for and method of processing substrate
SAMSUNG ELECTRONICS CO LTD1 citations51