Inventor

KU WEN-YU

TW17 patents

⚠️ This page may combine multiple inventors who share the name “KU WEN-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KU WEN-YU

TAIWAN SEMICONDUCTOR MFG CO LTD

Method of forming a semiconductor device by high-pressure anneal and post-anneal treatment

Method of forming semiconductor device by driving hydrogen into a dielectric layer from another dielectric layer

Semiconductor device having hydrogen in a dielectric layer

Semiconductor device having hydrogen in a dielectric layer

Method of forming a semiconductor device by driving hydrogen into a dielectric layer from another dielectric layer

Method for etching etch layer

Method for etching etch layer

Laser device and method of using the same

Method for managing temperature in semiconductor fabrication facility

Systems and methods for a tunable electromagnetic field apparatus to improve doping uniformity

Systems and methods for a tunable electromagnetic field apparatus to improve doping uniformity

Dispensing apparatus and dispensing method

Method for etching etch layer and wafer etching apparatus

Integrated system, integrated system operation method and film treatment method

TAIWAN SEMICONDUCTOR MFG

N-type buried layer drive-in recipe to reduce pits over buried antimony layer

CHANG CHUN-LIN

System and method of ion neutralization with multiple-zoned plasma flood gun

HWANG CHIH-HONG

System and method of ion beam source for semiconductor ion implantation