Inventor
IWAMOTO TADAMASA
JP16 patents
⚠️ This page may combine multiple inventors who share the name “IWAMOTO TADAMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TDK CORP
14 patentsUS10512948B2Dec 24, 2019
Gas purge unit and gas purge apparatus
TDK CORP6 citations83
US9895723B2Feb 20, 2018
Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
TDK CORP8 citations83
US9536765B2Jan 3, 2017
Load port unit and EFEM system
TDK CORP13 citations82
US11446713B2Sep 20, 2022
Gas purge unit and load port apparatus
TDK CORP3 citations72
US9929033B2Mar 27, 2018
Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
TDK CORP3 citations72
US9607871B2Mar 28, 2017
EFEM system and lid opening/closing method
TDK CORP3 citations72
US9543177B2Jan 10, 2017
Pod and purge system using the same
TDK CORP3 citations72
US11273472B2Mar 15, 2022
Bottom gas purge unit, load port apparatus, and bottom gas purge method
TDK CORP0 citations61
US11004714B2May 11, 2021
Load port
TDK CORP0 citations61
US11276599B2Mar 15, 2022
Load port apparatus, EFEM, and method of installing load port apparatus
TDK CORP0 citations51
US11145528B2Oct 12, 2021
Load port apparatus and method of mounting container
TDK CORP0 citations51
US10665488B2May 26, 2020
Load port apparatus and method of driving the same
TDK CORP0 citations51
US11699228B2Jul 11, 2023
Arrangement detector for plate-shaped object and load port including same
TDK CORP0 citations50
US11646215B2May 9, 2023
Load port apparatus and method of driving the same
TDK CORP0 citations49