Inventor
EMOTO JUN
JP16 patents
⚠️ This page may combine multiple inventors who share the name “EMOTO JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TDK CORP
11 patentsUS7789609B2Sep 7, 2010
Lid opening/closing system for closed container and substrate processing method using same
TDK CORP41 citations92
US7621714B2Nov 24, 2009
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
TDK CORP11 citations84
US10512948B2Dec 24, 2019
Gas purge unit and gas purge apparatus
TDK CORP6 citations83
US7927058B2Apr 19, 2011
Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
TDK CORP9 citations83
US9536765B2Jan 3, 2017
Load port unit and EFEM system
TDK CORP13 citations82
US6795202B2Sep 21, 2004
Wafer processing apparatus having wafer mapping function
TDK CORP14 citations82
US11446713B2Sep 20, 2022
Gas purge unit and load port apparatus
TDK CORP3 citations72
US9929033B2Mar 27, 2018
Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
TDK CORP3 citations72
US9786531B2Oct 10, 2017
Gas purge unit, load port apparatus, and installation stand for purging container
TDK CORP3 citations72
US9543177B2Jan 10, 2017
Pod and purge system using the same
TDK CORP3 citations72
US9833817B2Dec 5, 2017
Gas purge unit, load port apparatus, and installation stand for purging container
TDK CORP0 citations41