Inventor
CHEN BOXUE
US5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN BOXUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
4 patentsUS11143604B1Oct 12, 2021
Soft x-ray optics with improved filtering
KLA CORP4 citations70
US12025575B2Jul 2, 2024
Soft x-ray optics with improved filtering
KLA CORP0 citations60
US12480893B2Nov 25, 2025
Optical and X-ray metrology methods for patterned semiconductor structures with randomness
KLA CORP0 citations43
US12449386B2Oct 21, 2025
Forward library based seeding for efficient X-ray scatterometry measurements
KLA CORP0 citations37