Inventor

KUZNETSOV ALEXANDER

US37 patents

⚠️ This page may combine multiple inventors who share the name “KUZNETSOV ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KUZNETSOV ALEXANDER

KLA TENCOR CORP

Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy

Integrated use of model-based metrology and a process model

Compressive sensing for metrology

Optical metrology of periodic targets in presence of multiple diffraction orders

Metrology systems and methods for high aspect ratio and large lateral dimension structures

Optical metrology using targets with field enhancement elements

Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction

Measurement models of nanowire semiconductor structures based on re-useable sub-structures

Methods and apparatus for patterned wafer characterization

Metrology of multiple patterning processes

On-device metrology using target decomposition

Metrology system optimization for parameter tracking

Methods and systems for characterization of an x-ray beam with high spatial resolution

Multilayer targets for calibration and alignment of X-ray based measurement systems

Hybrid metrology for patterned wafer characterization

Bandgap measurements of patterned film stacks using spectroscopic metrology

Measurement methodology of advanced nanostructures

Semiconductor metrology with information from multiple processing steps

Compressive sensing for metrology

Semiconductor metrology and defect classification using electron microscopy

Methods and systems for co-located metrology

KLA CORP

Methods and systems for overlay measurement based on soft X-ray Scatterometry

Methods and systems for semiconductor metrology based on wavelength resolved soft X-ray reflectometry

Self-calibrating overlay metrology

Soft x-ray optics with improved filtering

Systems and methods for combined reflectometry and photoelectron spectroscopy

Soft x-ray optics with improved filtering

Self-calibrating overlay metrology

Bandgap measurements of patterned film stacks using spectroscopic metrology

Self-calibrated overlay metrology using a skew training sample

KUZNETSOV ALEXANDER

Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection

SEAGATE TECHNOLOGY LLC

Structured set partitioning and multilevel coding for partial response channels

HITACHI LTD

Digital write-and-read method and signal processing apparatus

INST DATA STORAGE

Precoders for partial response channels

KLA—TENCOR CORP

Signal response metrology for scatterometry based overlay measurements

VENKATARAMANI RAMAN

Programmable soft-output Viterbi algorithm system and method

DMG MORI CO LTD

Additive-manufacturing head and manufacturing machine