Inventor
MUROYAMA MASAKAZU
JP27 patents
Patents
27 patentsUS5779521AJul 14, 1998
Method and apparatus for chemical/mechanical polishing
SONY CORP80 citations96
US5728308AMar 17, 1998
Method of polishing a semiconductor substrate during production of a semiconductor device
SONY CORP56 citations96
US6900066B2May 31, 2005
Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
SONY CORP29 citations92
US6126514AOct 3, 2000
Polishing slurry and polishing method using the same
SONY CORP20 citations92
US5767016AJun 16, 1998
Method of forming a wiring layer on a semiconductor by polishing with treated slurry
SONY CORP35 citations92
US5709588AJan 20, 1998
Polishing slurry and polishing process using the same
SONY CORP48 citations92
US5578530ANov 26, 1996
Manufacturing method of semiconductor device which includes forming a silicon nitride layer using a Si, N, and F containing compound
SONY CORP28 citations92
US5470800ANov 28, 1995
Method for forming an interlayer film
SONY CORP32 citations92
US5320708AJun 14, 1994
Dry etching method
SONY CORP23 citations92
US5260232ANov 9, 1993
Refractory metal plug forming method
SONY CORP30 citations92
US5248629ASep 28, 1993
Process for fabricating capacitor for semiconductor storage device
SONY CORP34 citations92
US6991949B2Jan 31, 2006
Manufacturing method of an electron emitting apparatus
SONY CORP16 citations83
US6580155B1Jun 17, 2003
Semiconductor device
SONY CORP7 citations74
US6066573AMay 23, 2000
Method of producing dielectric film
SONY CORP11 citations74
US5700736ADec 23, 1997
Method for making semiconductor device
SONY CORP9 citations74
US5264074ANov 23, 1993
Flattening method for interlayer insulating film
SONY CORP9 citations74
US5028497AJul 2, 1991
Magnetic recording medium utilizing a fungicide
SONY CORP8 citations73
US4656089AApr 7, 1987
Magnetic recording medium
SONY CORP10 citations73
US10886335B2Jan 5, 2021
Imaging element, stacked-type imaging element, imaging apparatus and electronic apparatus
SONY CORP2 citations71
US5314710AMay 24, 1994
Insulation layer forming method
SONY CORP3 citations63
US10892302B2Jan 12, 2021
Photoelectric conversion element, imaging element, stacked-type imaging element, and solid-state imaging apparatus
SONY CORP0 citations62
US7166482B2Jan 23, 2007
Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
SONY CORP3 citations62
US6169023B1Jan 2, 2001
Method for making semiconductor device
SONY CORP0 citations52
US7195943B2Mar 27, 2007
Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
SONY CORP0 citations51
US7169628B2Jan 30, 2007
Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
SONY CORP0 citations51
US7118927B2Oct 10, 2006
Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
SONY CORP0 citations51
US9450186B2Sep 20, 2016
6,12-dioxaanthanthrene derivative, organic semiconductor element, and method for manufacturing organic semiconductor element
SONY CORP0 citations48