Inventor
ANTONIO RALPH PETER
US3 patents
Patents
3 patentsUS11215934B2Jan 4, 2022
In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing
APPLIED MATERIALS INC0 citations59
US10883932B2Jan 5, 2021
Advanced in-situ particle detection system for semiconductor substrate processing systems
APPLIED MATERIALS INC0 citations57
US10365216B2Jul 30, 2019
Advanced in-situ particle detection system for semiconductor substrate processing systems
APPLIED MATERIALS INC0 citations46