Inventor

PEITZSCH SCOTT E

US6 patents

⚠️ This page may combine multiple inventors who share the name “PEITZSCH SCOTT E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US9108322B2Aug 18, 2015

Force sensing system for substrate lifting apparatus

VARIAN SEMICONDUCTOR EQUIPMENT9 citations80

US8004817B2Aug 23, 2011

Method of platen fabrication to allow electrode pattern and gas cooling optimization

VARIAN SEMICONDUCTOR EQUIPMENT3 citations58

APPLIED MATERIALS INC

2 patents

US11670532B1Jun 6, 2023

System and method for controlling electrostatic clamping of multiple platens on a spinning disk

APPLIED MATERIALS INC2 citations71

US10879038B1Dec 29, 2020

Conductive beam optic containing internal heating element

APPLIED MATERIALS INC0 citations47

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

2 patents

US9417280B2Aug 16, 2016

System and method for analyzing voltage breakdown in electrostatic chucks

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations49

US10732615B2Aug 4, 2020

System and method for minimizing backside workpiece damage

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations47