Inventor
PARK HYEON WOO
KR7 patents
Patents
7 patentsUS10982144B2Apr 20, 2021
Silicon nitride layer etching composition and etching method using the same
ENF TECHNOLOGY CO LTD1 citations59
US11987740B2May 21, 2024
Silicon nitride film etching composition and etching method using the same
ENF TECHNOLOGY CO LTD0 citations56
US11091695B2Aug 17, 2021
Etching composition and etching method using the same
ENF TECHNOLOGY CO LTD0 citations56
US11939505B2Mar 26, 2024
Silicon nitride film etching composition and etching method using the same
ENF TECHNOLOGY CO LTD0 citations46
US11149201B2Oct 19, 2021
Silicon nitride layer etching composition
ENF TECHNOLOGY CO LTD0 citations46
US12031077B2Jul 9, 2024
Etching composition for metal nitride layer and etching method using the same
ENF TECHNOLOGY CO LTD0 citations45
US10920142B2Feb 16, 2021
Polysiloxane-based compound, silicon nitride layer etching composition including the same
ENF TECHNOLOGY CO LTD0 citations45